Metal - Semiconductor Contacts and Devices: 13 (VLSI Electronics Microstructure Science) Book PDF, ePub eBook

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Book Descriptions:
VLSI Electronics Microstructure Science, Volume 13: Metal-Semiconductor Contacts and Devices presents the physics, technology, and applications of metal-semiconductor barriers in digital integrated circuits. The emphasis is placed on the interplay among the theory, processing, and characterization techniques in the development of practical metal-semiconductor contacts and devices.

This volume contains chapters that are devoted to the discussion of the physics of metal-semiconductor interfaces and its basic phenomena; fabrication procedures; and interface characterization techniques, particularly, ohmic contacts. Contacts that involve polycrystalline silicon; applications of the metal-semiconductor barriers in MOS, bipolar, and MESFET digital integrated circuits; and methods for measuring the barrier height are covered as well.

Process engineers, device physicists, circuit designers, and students of this discipline will find the book very useful.

Metal - Semiconductor Contacts and Devices: 13 (VLSI Electronics Microstructure Science) by Simon S. Cohen, Gennady Sh. Gildenblat

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